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1.	Beck, Marc, et al. (author) Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography 2004 In: Microelectronic Engineering. - 1873-5568. ; 73-74, s. 837-842 Journal article (peer-reviewed)abstract Nanometer-structured transducers for commercial use in pharmaceutical, medical or (bio-) chemical analysis have so far been hardly accessible since they could not be produced by parallel lithography techniques at reasonable costs. We introduce here a method on. how to fabricate nanometer-structured interdigitated array electrodes including interconnections and bond pads in the micrometer range in a single imprint step on 2-in. wafer scale. The method enables the mass production of those devices at lowest cost opening a new field for the commercial use of nanometer-structured sensor systems.
2.	Carlberg, Patrick, et al. (author) Nanoimprint - a tool for realizing nano-bio research 2004 In: 2004 4th IEEE Conference on Nanotechnology. - 0780385365 ; , s. 199-200 Conference paper (peer-reviewed)abstract In this paper, we present a status report on how implementation of nanoimprint lithography has advanced our research. Contact guidance nerve growth experiments have so far primarily been done on micrometer-structured surfaces. We have made a stamp with 17 areas of different, submicron, line width and spacing covering a total 2.6 mm

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Author/Editor: Maximov, Ivan (2); Beck, Marc (2)Undo refine; Carlberg, Patrick (2); Montelius, Lars (2); Persson, F. (2)Undo refine; Heidari, B (1); show more...; Graczyk, Mariusz (1); Seifert, Werner (1); Samuelson, Lars (1); Borgström, Magnus (1); Mårtensson, Thomas (1); Johansson, F (1); Bunk, Richard (1); Sarwe, Eva-Lena (1); Ling, TGI (1); Kanje, M. (1); Mansson, A (1); Nilsson, S G (1); Grazcyk, M (1); Ling, T (1); show less...

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